A novel high-performance wide-range vacuum sensor based on a weak-coupling resonator
Abstract Wide-range vacuum sensors (0.1–105 Pa) are crucial for a variety of applications, particularly in semiconductor equipment. However, existing sensors often face a trade-off between measurement range and accuracy, with some offering a wide range at the expense of low accuracy, and others prov...
Saved in:
| Main Authors: | , , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2025-05-01
|
| Series: | Microsystems & Nanoengineering |
| Online Access: | https://doi.org/10.1038/s41378-025-00937-z |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|