Investigation of additional responses caused by sample surface topography in piezoresponse force microscopy measurement

The purpose of this study is to elucidate the origin of the additional response signals arising from the surface topography of samples during piezoresponse force microscopy (PFM) measurements. Periodic mountain-shaped protrusions with triangular cross-sections were fabricated on the surface of a sil...

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Bibliographic Details
Main Authors: Shotaro IKEMOTO, Masataka ABE, Azusa N. HATTORI, Takashi SUMIGAWA
Format: Article
Language:Japanese
Published: The Japan Society of Mechanical Engineers 2025-04-01
Series:Nihon Kikai Gakkai ronbunshu
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Online Access:https://www.jstage.jst.go.jp/article/transjsme/91/944/91_25-00034/_pdf/-char/en
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