Design and Testing of MEMS Component for Electromagnetic Pulse Protection

With the demand for high-safety, high-integration, and lightweight micro- and nano-electronic components, an MEMS electromagnetic energy-releasing component was innovatively designed based on the corona discharge theory. The device subverted the traditional device-level protection method for electro...

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Bibliographic Details
Main Authors: Shiyi Li, Hengzhen Feng, Wenzhong Lou, Yuecen Zhao, Sining Lv, Wenxing Kan
Format: Article
Language:English
Published: MDPI AG 2025-01-01
Series:Sensors
Subjects:
Online Access:https://www.mdpi.com/1424-8220/25/1/221
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