Measuring. Monitoring. Management. Control
Background. The paper investigates the sensing element of a capacitive pressure sensor based on a silicon corrugated membrane. Materials and methods. Using finite element modeling, the parameters of the corrugation were determined, which make it possible to double the sensitivity compared to a fla...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Penza State University Publishing House
2024-12-01
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| Series: | Измерение, мониторинг, управление, контроль |
| Subjects: | |
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| _version_ | 1832544761167216640 |
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| author | V.S. Volkov S.N. Bazykin V.A. Bardin K.S. Samohina N.V. Volkova |
| author_facet | V.S. Volkov S.N. Bazykin V.A. Bardin K.S. Samohina N.V. Volkova |
| author_sort | V.S. Volkov |
| collection | DOAJ |
| description | Background. The paper investigates the sensing element of a capacitive pressure sensor based on a silicon
corrugated membrane. Materials and methods. Using finite element modeling, the parameters of the corrugation were
determined, which make it possible to double the sensitivity compared to a flat membrane having similar overall dimensions.
Results and conclusions. It is shown that the presence of an edge corrugation with a rectangular profile makes it possible
to increase the sensitivity of the membrane. |
| format | Article |
| id | doaj-art-7e80f326cf6d46228e5be16c7c911b46 |
| institution | Kabale University |
| issn | 2307-5538 |
| language | English |
| publishDate | 2024-12-01 |
| publisher | Penza State University Publishing House |
| record_format | Article |
| series | Измерение, мониторинг, управление, контроль |
| spelling | doaj-art-7e80f326cf6d46228e5be16c7c911b462025-02-03T09:51:10ZengPenza State University Publishing HouseИзмерение, мониторинг, управление, контроль2307-55382024-12-014768310.21685/2307-5538-2024-4-9Measuring. Monitoring. Management. ControlV.S. Volkov0S.N. Bazykin1V.A. Bardin2K.S. Samohina3N.V. Volkova4Penza State UniversityPenza State UniversityPenza State UniversityPenza State UniversityPenza State UniversityBackground. The paper investigates the sensing element of a capacitive pressure sensor based on a silicon corrugated membrane. Materials and methods. Using finite element modeling, the parameters of the corrugation were determined, which make it possible to double the sensitivity compared to a flat membrane having similar overall dimensions. Results and conclusions. It is shown that the presence of an edge corrugation with a rectangular profile makes it possible to increase the sensitivity of the membrane.semiconductor membranesensing elementcorrugationmechanical stressdeflectionsensitivity |
| spellingShingle | V.S. Volkov S.N. Bazykin V.A. Bardin K.S. Samohina N.V. Volkova Measuring. Monitoring. Management. Control Измерение, мониторинг, управление, контроль semiconductor membrane sensing element corrugation mechanical stress deflection sensitivity |
| title | Measuring. Monitoring. Management. Control |
| title_full | Measuring. Monitoring. Management. Control |
| title_fullStr | Measuring. Monitoring. Management. Control |
| title_full_unstemmed | Measuring. Monitoring. Management. Control |
| title_short | Measuring. Monitoring. Management. Control |
| title_sort | measuring monitoring management control |
| topic | semiconductor membrane sensing element corrugation mechanical stress deflection sensitivity |
| work_keys_str_mv | AT vsvolkov measuringmonitoringmanagementcontrol AT snbazykin measuringmonitoringmanagementcontrol AT vabardin measuringmonitoringmanagementcontrol AT kssamohina measuringmonitoringmanagementcontrol AT nvvolkova measuringmonitoringmanagementcontrol |