Measuring. Monitoring. Management. Control
Background. The paper investigates the sensing element of a capacitive pressure sensor based on a silicon corrugated membrane. Materials and methods. Using finite element modeling, the parameters of the corrugation were determined, which make it possible to double the sensitivity compared to a fla...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Penza State University Publishing House
2024-12-01
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| Series: | Измерение, мониторинг, управление, контроль |
| Subjects: | |
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| Summary: | Background. The paper investigates the sensing element of a capacitive pressure sensor based on a silicon
corrugated membrane. Materials and methods. Using finite element modeling, the parameters of the corrugation were
determined, which make it possible to double the sensitivity compared to a flat membrane having similar overall dimensions.
Results and conclusions. It is shown that the presence of an edge corrugation with a rectangular profile makes it possible
to increase the sensitivity of the membrane. |
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| ISSN: | 2307-5538 |