Tantalum airbridges for scalable superconducting quantum processors
Abstract The unique property of tantalum, particularly its exceptional resistance to both acid and alkali, makes it promising for superconducting quantum processors. Here, we propose a novel lift-off method for fabricating tantalum airbridges with separate or fully-capped structures. This method int...
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| Main Authors: | , , , , , , , , , , |
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| Format: | Article |
| Language: | English |
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Nature Portfolio
2025-01-01
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| Series: | npj Quantum Information |
| Online Access: | https://doi.org/10.1038/s41534-025-00972-8 |
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| _version_ | 1832571453196730368 |
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| author | Kunliang Bu Sainan Huai Zhenxing Zhang Dengfeng Li Yuan Li Jingjing Hu Xiaopei Yang Maochun Dai Tianqi Cai Yi-Cong Zheng Shengyu Zhang |
| author_facet | Kunliang Bu Sainan Huai Zhenxing Zhang Dengfeng Li Yuan Li Jingjing Hu Xiaopei Yang Maochun Dai Tianqi Cai Yi-Cong Zheng Shengyu Zhang |
| author_sort | Kunliang Bu |
| collection | DOAJ |
| description | Abstract The unique property of tantalum, particularly its exceptional resistance to both acid and alkali, makes it promising for superconducting quantum processors. Here, we propose a novel lift-off method for fabricating tantalum airbridges with separate or fully-capped structures. This method introduces an aluminum film as a barrier layer to separate two layers of photoresist, which is then etched away before depositing tantalum film. We experimentally characterize these tantalum airbridges as control line jumpers, ground plane crossovers and coupling elements, and further validate the overall adaptability by a 13-qubit quantum processor with a median T 1 exceeding 100 μs. The median single-qubit gate fidelity is measured at 99.95(2)% for isolated Randomized Benchmarking and 99.94(2)% for the simultaneous one. Additionally, the experimental achievement of airbridge coupling with a controlled-Z gate fidelity surpassing 99.2(2)% in a separate two-qubit quantum chip may facilitate scalable quantum computation and quantum error correction with entirely tantalum elements. |
| format | Article |
| id | doaj-art-782aaa1fbc4c419f89d6784a4dbbb8d4 |
| institution | Kabale University |
| issn | 2056-6387 |
| language | English |
| publishDate | 2025-01-01 |
| publisher | Nature Portfolio |
| record_format | Article |
| series | npj Quantum Information |
| spelling | doaj-art-782aaa1fbc4c419f89d6784a4dbbb8d42025-02-02T12:35:48ZengNature Portfolionpj Quantum Information2056-63872025-01-011111910.1038/s41534-025-00972-8Tantalum airbridges for scalable superconducting quantum processorsKunliang Bu0Sainan Huai1Zhenxing Zhang2Dengfeng Li3Yuan Li4Jingjing Hu5Xiaopei Yang6Maochun Dai7Tianqi Cai8Yi-Cong Zheng9Shengyu Zhang10Tencent Quantum Laboratory, TencentTencent Quantum Laboratory, TencentTencent Quantum Laboratory, TencentTencent Quantum Laboratory, TencentTencent Quantum Laboratory, TencentTencent Quantum Laboratory, TencentTencent Quantum Laboratory, TencentTencent Quantum Laboratory, TencentTencent Quantum Laboratory, TencentTencent Quantum Laboratory, TencentTencent Quantum Laboratory, TencentAbstract The unique property of tantalum, particularly its exceptional resistance to both acid and alkali, makes it promising for superconducting quantum processors. Here, we propose a novel lift-off method for fabricating tantalum airbridges with separate or fully-capped structures. This method introduces an aluminum film as a barrier layer to separate two layers of photoresist, which is then etched away before depositing tantalum film. We experimentally characterize these tantalum airbridges as control line jumpers, ground plane crossovers and coupling elements, and further validate the overall adaptability by a 13-qubit quantum processor with a median T 1 exceeding 100 μs. The median single-qubit gate fidelity is measured at 99.95(2)% for isolated Randomized Benchmarking and 99.94(2)% for the simultaneous one. Additionally, the experimental achievement of airbridge coupling with a controlled-Z gate fidelity surpassing 99.2(2)% in a separate two-qubit quantum chip may facilitate scalable quantum computation and quantum error correction with entirely tantalum elements.https://doi.org/10.1038/s41534-025-00972-8 |
| spellingShingle | Kunliang Bu Sainan Huai Zhenxing Zhang Dengfeng Li Yuan Li Jingjing Hu Xiaopei Yang Maochun Dai Tianqi Cai Yi-Cong Zheng Shengyu Zhang Tantalum airbridges for scalable superconducting quantum processors npj Quantum Information |
| title | Tantalum airbridges for scalable superconducting quantum processors |
| title_full | Tantalum airbridges for scalable superconducting quantum processors |
| title_fullStr | Tantalum airbridges for scalable superconducting quantum processors |
| title_full_unstemmed | Tantalum airbridges for scalable superconducting quantum processors |
| title_short | Tantalum airbridges for scalable superconducting quantum processors |
| title_sort | tantalum airbridges for scalable superconducting quantum processors |
| url | https://doi.org/10.1038/s41534-025-00972-8 |
| work_keys_str_mv | AT kunliangbu tantalumairbridgesforscalablesuperconductingquantumprocessors AT sainanhuai tantalumairbridgesforscalablesuperconductingquantumprocessors AT zhenxingzhang tantalumairbridgesforscalablesuperconductingquantumprocessors AT dengfengli tantalumairbridgesforscalablesuperconductingquantumprocessors AT yuanli tantalumairbridgesforscalablesuperconductingquantumprocessors AT jingjinghu tantalumairbridgesforscalablesuperconductingquantumprocessors AT xiaopeiyang tantalumairbridgesforscalablesuperconductingquantumprocessors AT maochundai tantalumairbridgesforscalablesuperconductingquantumprocessors AT tianqicai tantalumairbridgesforscalablesuperconductingquantumprocessors AT yicongzheng tantalumairbridgesforscalablesuperconductingquantumprocessors AT shengyuzhang tantalumairbridgesforscalablesuperconductingquantumprocessors |