Tantalum airbridges for scalable superconducting quantum processors
Abstract The unique property of tantalum, particularly its exceptional resistance to both acid and alkali, makes it promising for superconducting quantum processors. Here, we propose a novel lift-off method for fabricating tantalum airbridges with separate or fully-capped structures. This method int...
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| Main Authors: | , , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Portfolio
2025-01-01
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| Series: | npj Quantum Information |
| Online Access: | https://doi.org/10.1038/s41534-025-00972-8 |
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