An Adaptive Three-Dimensional Self-Masking Strategy for the Micro-Fabrication of Quartz-MEMS with Out-of-Plane Vibration Units

An Adaptive Three-Dimensional Self-Masking Strategy for the Micro-Fabrication of Quartz-MEMS with Out-of-Plane Vibration Units

Quartz crystal out-of-plane vibration units are critical components of QMEMS devices. However, the fabrication of their 3D sidewall electrode structures presents significant challenges, particularly within ultrafine etched grooves. These challenges seriously limit further miniaturization, which is c...

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Bibliographic Details
Main Authors: Yide Dong, Chunyan Yin, Guangbin Dou, Litao Sun
Format: Article
Language:English
Published: MDPI AG 2025-05-01
Series:Micromachines
Subjects:
quartz crystal
quartz MEMS
micro-fabrication
vibration units
tuning fork
Online Access:https://www.mdpi.com/2072-666X/16/6/609
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