Optimization and Validation of Wafer Surface Defect Detection Algorithm Based on RT-DETR
In response to the issue of poor detection performance on wafer surface defect spots and elongated scratches, an improved RT-DETR method for wafer surface defect detection is proposed. Firstly, a dynamic snake convolutional layer is introduced to detect elongated scratches where conventional convolu...
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| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2025-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/10892113/ |
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