The elasticity and piezoelectricity of AlN containing charged vacancies
Wurtzite aluminum nitride (w-AlN) piezoelectric film plays a key role in modern MEMS actuators and sensors. Density functional theory can be used to predict the elastic and piezoelectric properties of AlN containing various charged vacancies, thereby obtaining methods for improving the piezoelectric...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Taylor & Francis Group
2024-12-01
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| Series: | International Journal of Optomechatronics |
| Subjects: | |
| Online Access: | https://www.tandfonline.com/doi/10.1080/15599612.2024.2332242 |
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