Size Effects in Ruthenium-Based Thick-Film Resistors: Rutile vs. Pyrochlore-Based Resistors
The size effect, namely the change of sheet resistance, Rs as a function of resistor length, has been investigated in layers whose conductive phase evolves from Pb-rich (Ru-deficient pyrochlores) to Pb2Ru2O6.5 and finally to RuO2 by increasing the firing temperature. It is found that Bi diffusion fr...
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Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
Wiley
1991-01-01
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Series: | Active and Passive Electronic Components |
Subjects: | |
Online Access: | http://dx.doi.org/10.1155/1991/94210 |
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Summary: | The size effect, namely the change of sheet resistance, Rs as a function of resistor length, has
been investigated in layers whose conductive phase evolves from Pb-rich (Ru-deficient pyrochlores) to
Pb2Ru2O6.5 and finally to RuO2 by increasing the firing temperature. It is found that Bi diffusion from
the terminations is responsible for lower sheet resistance values in shorter resistors whatever the conductive
phase is. On the contrary, Ag diffusion is responsible for lower sheet resistance values in shorter
resistors only in the case of ruthenate conductive grains while the reverse is observed in RuO2-based
layers. Size effect can be suppressed with Pt/Au-based terminations provided that no Bi is contained
and with Au-metallorganic-based contact provided that the peak firing temperature is not too high. |
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ISSN: | 0882-7516 1563-5031 |