Analysis and Control on a Specific Electromagnetic Micromirror

In this paper, 10 resonant modes were divided based on the structure of a specific two-dimensional electromagnetic micromirror from Professor Shen’s team and Finite Element Method (FEM), and using as many as 10 resonant modes to do such analysis was the first time according to the best of our knowle...

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Main Authors: Wanyan Sun, Yonghong Tan, Ruili Dong, Wenjiang Shen
Format: Article
Language:English
Published: Wiley 2020-01-01
Series:Discrete Dynamics in Nature and Society
Online Access:http://dx.doi.org/10.1155/2020/4612376
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author Wanyan Sun
Yonghong Tan
Ruili Dong
Wenjiang Shen
author_facet Wanyan Sun
Yonghong Tan
Ruili Dong
Wenjiang Shen
author_sort Wanyan Sun
collection DOAJ
description In this paper, 10 resonant modes were divided based on the structure of a specific two-dimensional electromagnetic micromirror from Professor Shen’s team and Finite Element Method (FEM), and using as many as 10 resonant modes to do such analysis was the first time according to the best of our knowledge. The results showed that the slow axis can participate in several resonant motions under the signals of resonant frequencies. In particular, participating in Mode 1 for slow-scan axis was the key reason to the instability of Vertical Refreshing Scanning (VRS) in raster scanning. In addition, a piecewise PID control based on filters design for this electromagnetic micromirror was proposed to suppress the unexpected resonant oscillation and to improve the angular positioning accuracy in slow-scan axis control. Finally, the proposed method was applied to electromagnetic micromirror stages, and the experimental results showed that the proposed approach was reliable.
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institution Kabale University
issn 1026-0226
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publishDate 2020-01-01
publisher Wiley
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series Discrete Dynamics in Nature and Society
spelling doaj-art-6f54dc069fbe4032b41a37978e067bbc2025-02-03T06:46:19ZengWileyDiscrete Dynamics in Nature and Society1026-02261607-887X2020-01-01202010.1155/2020/46123764612376Analysis and Control on a Specific Electromagnetic MicromirrorWanyan Sun0Yonghong Tan1Ruili Dong2Wenjiang Shen3Tianjin Key Laboratory of Intelligent Robotics, Nankai University, Tianjin 300350, ChinaCollege of Information Mechanical and Electrical Engineering, Shanghai Normal University, Shanghai 201418, ChinaCollege of Information Science and Technology, Donghua University, Shanghai 200000, ChinaSuzhou Institute of Nano-tech and Nano-bionics, Chinese Academy of Science, Suzhou 215123, ChinaIn this paper, 10 resonant modes were divided based on the structure of a specific two-dimensional electromagnetic micromirror from Professor Shen’s team and Finite Element Method (FEM), and using as many as 10 resonant modes to do such analysis was the first time according to the best of our knowledge. The results showed that the slow axis can participate in several resonant motions under the signals of resonant frequencies. In particular, participating in Mode 1 for slow-scan axis was the key reason to the instability of Vertical Refreshing Scanning (VRS) in raster scanning. In addition, a piecewise PID control based on filters design for this electromagnetic micromirror was proposed to suppress the unexpected resonant oscillation and to improve the angular positioning accuracy in slow-scan axis control. Finally, the proposed method was applied to electromagnetic micromirror stages, and the experimental results showed that the proposed approach was reliable.http://dx.doi.org/10.1155/2020/4612376
spellingShingle Wanyan Sun
Yonghong Tan
Ruili Dong
Wenjiang Shen
Analysis and Control on a Specific Electromagnetic Micromirror
Discrete Dynamics in Nature and Society
title Analysis and Control on a Specific Electromagnetic Micromirror
title_full Analysis and Control on a Specific Electromagnetic Micromirror
title_fullStr Analysis and Control on a Specific Electromagnetic Micromirror
title_full_unstemmed Analysis and Control on a Specific Electromagnetic Micromirror
title_short Analysis and Control on a Specific Electromagnetic Micromirror
title_sort analysis and control on a specific electromagnetic micromirror
url http://dx.doi.org/10.1155/2020/4612376
work_keys_str_mv AT wanyansun analysisandcontrolonaspecificelectromagneticmicromirror
AT yonghongtan analysisandcontrolonaspecificelectromagneticmicromirror
AT ruilidong analysisandcontrolonaspecificelectromagneticmicromirror
AT wenjiangshen analysisandcontrolonaspecificelectromagneticmicromirror