An Analytical Model for Aerostatic Thrust Bearings Based on the Average Pressure of the Area Surrounded by Orifice
Aerostatic thrust bearings are widely used in advanced equipment such as lithography machines due to their excellent lubrication performance. In this study, computational fluid dynamics (CFD) was employed for the analysis of errors in the calculation of static characteristics of bearings based on th...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-03-01
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| Series: | Lubricants |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2075-4442/13/3/110 |
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