Enhancing mechanical properties of (HfMoNbZrTa)1-xNx films through multi-phase structures in substoichiometric compositions
Elemental composition design is a common strategy for tuning the crystallographic structure of films, thereby optimizing their mechanical properties. The evolution of film structure is highly dependent on both selection and concentration of cation and anion elements. In this work, we utilized strong...
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| Main Authors: | , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2025-01-01
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| Series: | Journal of Materials Research and Technology |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2238785424029375 |
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