APA (7th ed.) Citation

Kobayashi, T., Fujimoto, H., Kamihata, S., Hachiken, K., Hara, M., & Watanabe, H. Performance and reliability improvements in SiC(0001) MOS devices via two-step annealing in H2/Ar gas mixtures. IOP Publishing.

Chicago Style (17th ed.) Citation

Kobayashi, Takuma, Hiroki Fujimoto, Shinji Kamihata, Keiji Hachiken, Masahiro Hara, and Heiji Watanabe. Performance and Reliability Improvements in SiC(0001) MOS Devices via Two-step Annealing in H2/Ar Gas Mixtures. IOP Publishing.

MLA (9th ed.) Citation

Kobayashi, Takuma, et al. Performance and Reliability Improvements in SiC(0001) MOS Devices via Two-step Annealing in H2/Ar Gas Mixtures. IOP Publishing.