Effect of electron irradiation on the optical properties of nanocrystalline SiC films on single crystal Al2O3 substrates

It was studied the effect of irradiation with high-energy (10 MeV) electrons on the optical properties of nanocrystalline carbide film system silicon / sapphire substrates in a wide range of fluences of 5·1014 to 2·1020 cm–2 and subsequent annealing in vacuum in the range of 200—1200°C. It was found...

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Bibliographic Details
Main Authors: O. V. Semenov, A. V. Lopin, V. N. Boriskin
Format: Article
Language:English
Published: Politehperiodika 2017-06-01
Series:Tekhnologiya i Konstruirovanie v Elektronnoi Apparature
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Online Access:https://tkea.com.ua/index.php/journal/article/view/204
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