Improvement of Adhesion, Line Definition, Contact Resistance and Semiconductor Properties by Sputter-Etching
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| Main Author: | |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Wiley
1979-01-01
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| Series: | Active and Passive Electronic Components |
| Online Access: | http://dx.doi.org/10.1155/APEC.5.215 |
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| _version_ | 1832552856303960064 |
|---|---|
| author | T. Kallfass |
| author_facet | T. Kallfass |
| author_sort | T. Kallfass |
| collection | DOAJ |
| format | Article |
| id | doaj-art-6ac7eea93392453284e4fa3e3f036c3e |
| institution | Kabale University |
| issn | 0882-7516 1563-5031 |
| language | English |
| publishDate | 1979-01-01 |
| publisher | Wiley |
| record_format | Article |
| series | Active and Passive Electronic Components |
| spelling | doaj-art-6ac7eea93392453284e4fa3e3f036c3e2025-02-03T05:57:37ZengWileyActive and Passive Electronic Components0882-75161563-50311979-01-015421521810.1155/APEC.5.215Improvement of Adhesion, Line Definition, Contact Resistance and Semiconductor Properties by Sputter-EtchingT. Kallfasshttp://dx.doi.org/10.1155/APEC.5.215 |
| spellingShingle | T. Kallfass Improvement of Adhesion, Line Definition, Contact Resistance and Semiconductor Properties by Sputter-Etching Active and Passive Electronic Components |
| title | Improvement of Adhesion, Line Definition, Contact Resistance and Semiconductor Properties by Sputter-Etching |
| title_full | Improvement of Adhesion, Line Definition, Contact Resistance and Semiconductor Properties by Sputter-Etching |
| title_fullStr | Improvement of Adhesion, Line Definition, Contact Resistance and Semiconductor Properties by Sputter-Etching |
| title_full_unstemmed | Improvement of Adhesion, Line Definition, Contact Resistance and Semiconductor Properties by Sputter-Etching |
| title_short | Improvement of Adhesion, Line Definition, Contact Resistance and Semiconductor Properties by Sputter-Etching |
| title_sort | improvement of adhesion line definition contact resistance and semiconductor properties by sputter etching |
| url | http://dx.doi.org/10.1155/APEC.5.215 |
| work_keys_str_mv | AT tkallfass improvementofadhesionlinedefinitioncontactresistanceandsemiconductorpropertiesbysputteretching |