Improvement of Adhesion, Line Definition, Contact Resistance and Semiconductor Properties by Sputter-Etching
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| Main Author: | |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
1979-01-01
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| Series: | Active and Passive Electronic Components |
| Online Access: | http://dx.doi.org/10.1155/APEC.5.215 |
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| ISSN: | 0882-7516 1563-5031 |
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