Electrostatic in-plane structural superlubric actuator
Abstract Micro actuators are widely used in NEMS/MEMS for control and sensing. However, most are designed with suspended beams anchored at fixed points, causing two main issues: restricted actuated stroke and movement modes, and reduced lifespan due to fatigue from repeated beam deformation, contact...
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| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Portfolio
2025-01-01
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| Series: | Nature Communications |
| Online Access: | https://doi.org/10.1038/s41467-024-55078-0 |
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