Questions of constructing probe active control devices for product sizes

Questions of constructing probe active control devices for product sizes

The article presents probe active control devices (ACD) of the size of products, describes the composition, versions, principle and modes of operation. The measurements are carried out by two-coordinate vibration oscillations of the tip along a closed path with a section of co-directional motion...

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Bibliographic Details
Main Author: E. V. Leun
Format: Article
Language:English
Published: Omsk State Technical University, Federal State Autonoumos Educational Institution of Higher Education 2018-09-01
Series:Омский научный вестник
Subjects:
active control
the size of the product
scanner
vibrоmotor
piezomotors
probe microscopy
tip
Online Access:https://www.omgtu.ru/general_information/media_omgtu/journal_of_omsk_research_journal/files/arhiv/2018/4%20(160)/127-133%20%D0%9B%D0%B5%D1%83%D0%BD%20%D0%95.%20%D0%92..pdf
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https://www.omgtu.ru/general_information/media_omgtu/journal_of_omsk_research_journal/files/arhiv/2018/4%20(160)/127-133%20%D0%9B%D0%B5%D1%83%D0%BD%20%D0%95.%20%D0%92..pdf

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