DESIGN OF A TWO-AXIS MEMS SENSOR FOR MEASURING THE FORCE AND TORQUE WITH COMB STRUCTURE
Based on the micro-electro-mechanical systems（MEMS） technology,the chip structure of a two-axis force sensor with comb structure was designed.Silicon force sensitive structure converted the faint mechanical signals into measurable electrical signals.After finite element model was established,the str...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | zho |
| Published: |
Editorial Office of Journal of Mechanical Strength
2018-01-01
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| Series: | Jixie qiangdu |
| Subjects: | |
| Online Access: | http://www.jxqd.net.cn/thesisDetails#10.16579/j.issn.1001.9669.2018.04.016 |
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