Simulation, development, and optical emission spectroscopy of microwave plasma chemical vapor deposition reactor for synthesis of large-area single crystal diamond
The work presents the geometrical advancement in the clamshell microwave plasma chemical vapor deposition reactor (2.45 GHz, 6 kW) to overcome the growth limitations of single crystal diamonds. Using electromagnetic and simplified fluid models, the geometrical parameters of a 2D axisymmetric cavity...
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| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2025-07-01
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| Series: | Next Materials |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2949822825003090 |
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