Structural Engineering of Multilayer TiN / CrN System Obtained by the Vacuum Arc Evaporation
By the X-ray diffraction, electron microscopy, and microindentation methods we have investigated the phase composition, structure, substructure and hardness of vacuum arc multilayer coatings of TiN / CrN system obtained in the range of nitrogen pressure of 1×10–5 ... 5×10–3 Torr when applying contin...
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| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Sumy State University
2015-03-01
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| Series: | Журнал нано- та електронної фізики |
| Subjects: | |
| Online Access: | http://jnep.sumdu.edu.ua/download/numbers/2015/1/articles/jnep_2015_V7_01034.pdf |
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