A Fuzzy Collaborative Sensor Network for Semiconductor Manufacturing Cycle Time Forecasting

Network based sensing has become an important field of research, and it is expected that new applications of remote sensing will be developed. A fuzzy collaborative sensor network is developed in this study to predict the cycle time of a job in a semiconductor manufacturing factory, which is an impo...

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Bibliographic Details
Main Authors: Yu-Cheng Lin, Toly Chen, Yu-Cheng Wang
Format: Article
Language:English
Published: Wiley 2013-03-01
Series:International Journal of Distributed Sensor Networks
Online Access:https://doi.org/10.1155/2013/257276
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