Enhanced Lithographic Hotspot Detection via Multi-Task Deep Learning With Synthetic Pattern Generation
Lithographic hotspot detection is crucial for ensuring manufacturability and yield in advanced integrated circuit (IC) designs. While machine learning approaches have shown promise, they often struggle with detecting truly-never-seen-before (TNSB) hotspots and reducing false alarms on hard-to-classi...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2025-01-01
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| Series: | IEEE Open Journal of the Computer Society |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/10772617/ |
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