A Review on the Inertial Measurement Unit Array of Microelectromechanical Systems
In recent years, microelectromechanical systems (MEMS) technology has developed rapidly, and low precision inertial devices have achieved small volume, light weight, and mass production. Under this background, array technology has emerged to achieve high precision inertial measurement under the prem...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2024-11-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/24/22/7140 |
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