APA (7th ed.) Citation

Vorobey, R. I., Gusev, O. K., Zharin, A. L., Petlitsky, A. N., Pilipenko, V. A., Turtsevitch, A. S., . . . Tyavlovsky, K. L. STUDY OF SILICON-INSULATOR STRUCTURE DEFECTS BASED ON ANALYSIS OF A SPATIAL DISTRIBUTION OF A SEMICONDUCTOR WAFERS’ SURFACE POTENTIAL. Belarusian National Technical University.

Chicago Style (17th ed.) Citation

Vorobey, R. I., O. K. Gusev, A. L. Zharin, A. N. Petlitsky, V. A. Pilipenko, A. S. Turtsevitch, A. K. Tyavlovsky, and K. L. Tyavlovsky. STUDY OF SILICON-INSULATOR STRUCTURE DEFECTS BASED ON ANALYSIS OF A SPATIAL DISTRIBUTION OF A SEMICONDUCTOR WAFERS’ SURFACE POTENTIAL. Belarusian National Technical University.

MLA (9th ed.) Citation

Vorobey, R. I., et al. STUDY OF SILICON-INSULATOR STRUCTURE DEFECTS BASED ON ANALYSIS OF A SPATIAL DISTRIBUTION OF A SEMICONDUCTOR WAFERS’ SURFACE POTENTIAL. Belarusian National Technical University.