Vacuum vaporizer for fabrication of thin films of material by sublimations
The offered vacuum vaporizer can be used under the vacuum fabrication of films from Cr, Mg, Mn, SiO, GeO, MoO3 , WO3, ZnS, ZnSe, CdS, CdSe, CdTe by sublimations. Vacuum vaporizer containing tubular element with tightly closed by flat end areas, executed from Та (or Мо) foil by the thickness (0,...
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| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Omsk State Technical University, Federal State Autonoumos Educational Institution of Higher Education
2019-12-01
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| Series: | Омский научный вестник |
| Subjects: | |
| Online Access: | https://www.omgtu.ru/general_information/media_omgtu/journal_of_omsk_research_journal/files/arhiv/2019/6%20(168)/80-82%20%D0%91%D0%BB%D0%B5%D1%81%D0%BC%D0%B0%D0%BD%20%D0%90.%20%D0%98.,%20%D0%91%D1%83%D1%80%D0%BB%D0%B0%D0%BA%D0%BE%D0%B2%20%D0%A0.%20%D0%91..pdf |
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