Investigating nonlinear dynamic properties of an inertial sensor with rotational velocity-dependent rigidity
Abstract This study investigates the nonlinear dynamics of a system with frequency-dependent stiffness using a MEMS-based capacitive inertial sensor as a case study. The sensor is positioned directly on a rotating component of a machine and consists of a microbeam clamped at both ends by fixed suppo...
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Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
Nature Portfolio
2025-01-01
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Series: | Scientific Reports |
Subjects: | |
Online Access: | https://doi.org/10.1038/s41598-024-84264-9 |
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