High-Precision Measurement Method for Small Angles Based on the Defect Spot Mode of the Position-Sensitive Detector

High-Precision Measurement Method for Small Angles Based on the Defect Spot Mode of the Position-Sensitive Detector

The paper proposes and verifies a small-angle measurement method based on the defect spot mode of the position-sensitive detector (PSD). With the output characteristics of the PSD in the defect spot mode and the size transformation properties of a focused beam, the measurement sensitivity can be sig...

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Bibliographic Details
Main Authors: Yusheng Zhai, Guorong Wang, Yiheng Zhao, Rongxin Wu, Lin Zhang, Zhan Su, Zhifeng Zhang, Peng Yang, Ruiliang Zhang
Format: Article
Language:English
Published: MDPI AG 2024-11-01
Series:Sensors
Subjects:
photoelectric technology
angle measurement
PSD
defect spot working mode
Online Access:https://www.mdpi.com/1424-8220/24/22/7120
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