Monocrystalline Silicon PERC Solar Cell with Rear-Side AlOx Film Formed by Furnace Oxidation

In this study, AlOx passivation layers on the rear sides of silicon PERC solar cells are formed by thermally oxidizing 3 nm-thick aluminum films deposited in advance by an e-gun evaporator. The oxidation process is conducted in a furnace full of oxygen at 400°C for a duration of 10 minutes, followed...

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Bibliographic Details
Main Authors: Ching-Hui Hsu, Da-Yao Lao, Likarn Wang
Format: Article
Language:English
Published: Wiley 2023-01-01
Series:International Journal of Photoenergy
Online Access:http://dx.doi.org/10.1155/2023/3312619
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