A large-size and polarization-independent two dimensional grating fabricated by scanned reactive-ion-beam etching
Scanned reactive-ion-beam etching method was proposed to transfer two-dimensional mask patterns into quartz substrate, which would produce a larger-size and polarization-independent two-dimensional grating. This method was realized by moving grating substrate in a unidimensional scanning manner and...
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| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
De Gruyter
2022-09-01
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| Series: | Nanophotonics |
| Subjects: | |
| Online Access: | https://doi.org/10.1515/nanoph-2022-0371 |
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