NANOSTRUCTURED CARBON MATERIALS IN EMISSION ELECTRONICS
This paper considers the influence of formation conditions on the composition and structure of polycluster diamond films, diamond-like carbon films and carbon nanowalls. Polycluster diamond films were obtained from a gas mixture of hydrogen and methane activated with arc and microwave discharges as...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | Russian |
| Published: |
MIREA - Russian Technological University
2017-06-01
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| Series: | Российский технологический журнал |
| Subjects: | |
| Online Access: | https://www.rtj-mirea.ru/jour/article/view/60 |
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