Design, Analysis, and Implementation of the Subdivision Interpolation Technique for the Grating Interferometric Micro-Displacement Sensor
A high-resolution grating interferometric micro-displacement sensor utilizing the subdivision interpolation technique is proposed and experimentally demonstrated. As the interference laser intensity varies sinusoidally with displacement, subdivision interpolation is a promising technique to achieve...
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Main Authors: | Jiuhui Tang, Haifeng Peng, Peng Yang, Shangzhou Guo, Wenqiang Sun, Li Jin, Kunyang Xie, Mengwei Li |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2025-01-01
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Series: | Photonics |
Subjects: | |
Online Access: | https://www.mdpi.com/2304-6732/12/1/64 |
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