Scanning microwave impedance microscopy and its applications: A review

Scanning microwave impedance microscopy (sMIM) has become a powerful tool for nanoscale characterization, utilizing microwave frequencies to probe the material properties of diverse systems with remarkable spatial resolution. This review offers an in-depth analysis of the foundational principles, te...

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Main Authors: Diego Tami, Douglas A. A. Ohlberg, Cássio Gonçalves do Rego, Gilberto Medeiros-Ribeiro, Jhonattan C. Ramirez
Format: Article
Language:English
Published: AIP Publishing LLC 2025-01-01
Series:APL Materials
Online Access:http://dx.doi.org/10.1063/5.0241574
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author Diego Tami
Douglas A. A. Ohlberg
Cássio Gonçalves do Rego
Gilberto Medeiros-Ribeiro
Jhonattan C. Ramirez
author_facet Diego Tami
Douglas A. A. Ohlberg
Cássio Gonçalves do Rego
Gilberto Medeiros-Ribeiro
Jhonattan C. Ramirez
author_sort Diego Tami
collection DOAJ
description Scanning microwave impedance microscopy (sMIM) has become a powerful tool for nanoscale characterization, utilizing microwave frequencies to probe the material properties of diverse systems with remarkable spatial resolution. This review offers an in-depth analysis of the foundational principles, technological advancements, and broad applications of sMIM. By harnessing near-field microwave interactions between a sharp metallic probe and the sample, sMIM enables simultaneous acquisition of both real (resistive) and imaginary (capacitive) components of the reflected signal, providing detailed insights into the local permittivity and conductivity of materials at the nanoscale. We address critical challenges, including impedance matching, probe–sample interactions, and the influence of environmental factors such as surface water layers and meniscus formation on resolution and contrast. Recent advancements in finite element modeling and the application of lumped-element circuit models have further enhanced the precision of signal interpretation, enabling more accurate analysis of complex systems. This review highlights sMIM’s wide-ranging applications, from material science and semiconductor diagnostics to biological systems, showcasing its ability to perform non-destructive, high-resolution imaging down to the single-digit nanometer scale. These capabilities position sMIM as an indispensable tool for advancing future innovations in nanotechnology and related fields.
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spelling doaj-art-3c162145833943fa94979c68daeafdf92025-02-03T16:42:31ZengAIP Publishing LLCAPL Materials2166-532X2025-01-01131010602010602-1610.1063/5.0241574Scanning microwave impedance microscopy and its applications: A reviewDiego Tami0Douglas A. A. Ohlberg1Cássio Gonçalves do Rego2Gilberto Medeiros-Ribeiro3Jhonattan C. Ramirez4Institute of Technological Sciences, Universidade Federal de Itajubá, Itabira, Minas Gerais, BrazilMicroscopy Center, Universidade Federal de Minas Gerais, Belo Horizonte, Minas Gerais, BrazilElectronic Engineering Department, Universidade Federal de Minas Gerais, Belo Horizonte, Minas Gerais, BrazilComputer Science Department, Universidade Federal de Minas Gerais, Belo Horizonte, Minas Gerais, BrazilElectronic Engineering Department, Universidade Federal de Minas Gerais, Belo Horizonte, Minas Gerais, BrazilScanning microwave impedance microscopy (sMIM) has become a powerful tool for nanoscale characterization, utilizing microwave frequencies to probe the material properties of diverse systems with remarkable spatial resolution. This review offers an in-depth analysis of the foundational principles, technological advancements, and broad applications of sMIM. By harnessing near-field microwave interactions between a sharp metallic probe and the sample, sMIM enables simultaneous acquisition of both real (resistive) and imaginary (capacitive) components of the reflected signal, providing detailed insights into the local permittivity and conductivity of materials at the nanoscale. We address critical challenges, including impedance matching, probe–sample interactions, and the influence of environmental factors such as surface water layers and meniscus formation on resolution and contrast. Recent advancements in finite element modeling and the application of lumped-element circuit models have further enhanced the precision of signal interpretation, enabling more accurate analysis of complex systems. This review highlights sMIM’s wide-ranging applications, from material science and semiconductor diagnostics to biological systems, showcasing its ability to perform non-destructive, high-resolution imaging down to the single-digit nanometer scale. These capabilities position sMIM as an indispensable tool for advancing future innovations in nanotechnology and related fields.http://dx.doi.org/10.1063/5.0241574
spellingShingle Diego Tami
Douglas A. A. Ohlberg
Cássio Gonçalves do Rego
Gilberto Medeiros-Ribeiro
Jhonattan C. Ramirez
Scanning microwave impedance microscopy and its applications: A review
APL Materials
title Scanning microwave impedance microscopy and its applications: A review
title_full Scanning microwave impedance microscopy and its applications: A review
title_fullStr Scanning microwave impedance microscopy and its applications: A review
title_full_unstemmed Scanning microwave impedance microscopy and its applications: A review
title_short Scanning microwave impedance microscopy and its applications: A review
title_sort scanning microwave impedance microscopy and its applications a review
url http://dx.doi.org/10.1063/5.0241574
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