Effect of plasma process parameters on the wear behavior of High-Power Pulsed Magnetron Sputtering deposited Aluminum Titanium Nitride coatings
High Power Pulsed Magnetron Sputtering (HPPMS) has emerged as a promising physical vapor deposition (PVD) technique for depositing hard coatings on cutting tools. Among these coatings, Aluminum Titanium Nitride (AlTiN) is widely recognized for its excellent mechanical and thermal properties, making...
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| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2025-03-01
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| Series: | Open Ceramics |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2666539525000136 |
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