Improved method to optimize the phase jump of multiple exposure-tiled gratings
Large-aperture gratings have significant applications in inertial confinement fusion, immersion lithography manufacturing and astronomical observation. Currently, it is challenging and expensive to manufacture sizable monolithic gratings. Therefore, tiled multiple small-aperture gratings are preferr...
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| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Cambridge University Press
2024-01-01
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| Series: | High Power Laser Science and Engineering |
| Subjects: | |
| Online Access: | https://www.cambridge.org/core/product/identifier/S2095471924000513/type/journal_article |
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