Pulsed Laser Deposition Method Used to Grow SiC Nanostructure on Porous Silicon Substrate: Synthesis and Optical Investigation for UV-Vis Photodetector Fabrication
In this study, a thin film of silicon carbide (SiC) was deposited on a porous silicon (P-Si) substrate using pulsed laser deposition (PLD). The photo–electrochemical etching method with an Nd: YAG laser at 1064 nm wavelength and 900 mJ pulse energy and at a vacuum of 10<sup>−2</sup> mbar...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-04-01
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| Series: | Thermo |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2673-7264/5/2/13 |
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