Electromagnetic deformable mirror fabricated using silicon micromachining and stress-resilient assembly
Introduction: This work presents a prototype electromagnetic actuation deformable mirror (DM) assembly with stress-resilient face sheet design.Methods: The DM face sheet design includes slender micromachined silicon pillars that are integrated with a silicon face sheet to reduce unpowered face sheet...
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| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Frontiers Media S.A.
2025-01-01
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| Series: | Advanced Optical Technologies |
| Subjects: | |
| Online Access: | https://www.frontiersin.org/articles/10.3389/aot.2025.1511907/full |
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