Sub-nanometer depth resolution and single dopant visualization achieved by tilt-coupled multislice electron ptychography

Abstract Real-space, three-dimensional imaging of atomic structures in materials science is a critical yet challenging task. Although scanning transmission electron microscopy has achieved sub-angstrom lateral resolution through techniques like electron ptychography, depth resolution remains limited...

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Main Authors: Zehao Dong, Yang Zhang, Chun-Chien Chiu, Sicheng Lu, Jianbing Zhang, Yu-Chen Liu, Suya Liu, Jan-Chi Yang, Pu Yu, Yayu Wang, Zhen Chen
Format: Article
Language:English
Published: Nature Portfolio 2025-01-01
Series:Nature Communications
Online Access:https://doi.org/10.1038/s41467-025-56499-1
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author Zehao Dong
Yang Zhang
Chun-Chien Chiu
Sicheng Lu
Jianbing Zhang
Yu-Chen Liu
Suya Liu
Jan-Chi Yang
Pu Yu
Yayu Wang
Zhen Chen
author_facet Zehao Dong
Yang Zhang
Chun-Chien Chiu
Sicheng Lu
Jianbing Zhang
Yu-Chen Liu
Suya Liu
Jan-Chi Yang
Pu Yu
Yayu Wang
Zhen Chen
author_sort Zehao Dong
collection DOAJ
description Abstract Real-space, three-dimensional imaging of atomic structures in materials science is a critical yet challenging task. Although scanning transmission electron microscopy has achieved sub-angstrom lateral resolution through techniques like electron ptychography, depth resolution remains limited to only 2 to 3 nanometers using single-projection setups. Attaining better depth resolution often requires large sample tilt angles and numerous projections, as demonstrated in atomic electron tomography. Here, we introduce an extension of multislice electron ptychography, which couples only a few small-angle projections to improve depth resolution by more than threefold, reaching the sub-nanometer scale and potentially approaching the atomic level. This technique maintains high resolving power for both light and heavy atoms, significantly enhancing the detection of individual dopants. We experimentally demonstrate three-dimensional visualization of dilute praseodymium dopants in a brownmillerite oxide, Ca2Co2O5, along with the accompanying lattice distortions. This approach can be implemented on widely available transmission electron microscopes equipped with hybrid pixel detectors, with data processing achievable using high-performance computing systems.
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issn 2041-1723
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publishDate 2025-01-01
publisher Nature Portfolio
record_format Article
series Nature Communications
spelling doaj-art-341b22a3d91a41e1a65c90cf5900a7cb2025-02-02T12:31:54ZengNature PortfolioNature Communications2041-17232025-01-0116111010.1038/s41467-025-56499-1Sub-nanometer depth resolution and single dopant visualization achieved by tilt-coupled multislice electron ptychographyZehao Dong0Yang Zhang1Chun-Chien Chiu2Sicheng Lu3Jianbing Zhang4Yu-Chen Liu5Suya Liu6Jan-Chi Yang7Pu Yu8Yayu Wang9Zhen Chen10State Key Laboratory of Low Dimensional Quantum Physics, Department of Physics, Tsinghua UniversityState Key Laboratory of Low Dimensional Quantum Physics, Department of Physics, Tsinghua UniversityDepartment of Physics, National Cheng Kung UniversityState Key Laboratory of Low Dimensional Quantum Physics, Department of Physics, Tsinghua UniversityState Key Laboratory of Low Dimensional Quantum Physics, Department of Physics, Tsinghua UniversityDepartment of Physics, National Cheng Kung UniversityShanghai Nanoport, ThermoFisher ScientificDepartment of Physics, National Cheng Kung UniversityState Key Laboratory of Low Dimensional Quantum Physics, Department of Physics, Tsinghua UniversityState Key Laboratory of Low Dimensional Quantum Physics, Department of Physics, Tsinghua UniversityBeijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of SciencesAbstract Real-space, three-dimensional imaging of atomic structures in materials science is a critical yet challenging task. Although scanning transmission electron microscopy has achieved sub-angstrom lateral resolution through techniques like electron ptychography, depth resolution remains limited to only 2 to 3 nanometers using single-projection setups. Attaining better depth resolution often requires large sample tilt angles and numerous projections, as demonstrated in atomic electron tomography. Here, we introduce an extension of multislice electron ptychography, which couples only a few small-angle projections to improve depth resolution by more than threefold, reaching the sub-nanometer scale and potentially approaching the atomic level. This technique maintains high resolving power for both light and heavy atoms, significantly enhancing the detection of individual dopants. We experimentally demonstrate three-dimensional visualization of dilute praseodymium dopants in a brownmillerite oxide, Ca2Co2O5, along with the accompanying lattice distortions. This approach can be implemented on widely available transmission electron microscopes equipped with hybrid pixel detectors, with data processing achievable using high-performance computing systems.https://doi.org/10.1038/s41467-025-56499-1
spellingShingle Zehao Dong
Yang Zhang
Chun-Chien Chiu
Sicheng Lu
Jianbing Zhang
Yu-Chen Liu
Suya Liu
Jan-Chi Yang
Pu Yu
Yayu Wang
Zhen Chen
Sub-nanometer depth resolution and single dopant visualization achieved by tilt-coupled multislice electron ptychography
Nature Communications
title Sub-nanometer depth resolution and single dopant visualization achieved by tilt-coupled multislice electron ptychography
title_full Sub-nanometer depth resolution and single dopant visualization achieved by tilt-coupled multislice electron ptychography
title_fullStr Sub-nanometer depth resolution and single dopant visualization achieved by tilt-coupled multislice electron ptychography
title_full_unstemmed Sub-nanometer depth resolution and single dopant visualization achieved by tilt-coupled multislice electron ptychography
title_short Sub-nanometer depth resolution and single dopant visualization achieved by tilt-coupled multislice electron ptychography
title_sort sub nanometer depth resolution and single dopant visualization achieved by tilt coupled multislice electron ptychography
url https://doi.org/10.1038/s41467-025-56499-1
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