Burst Laser-Driven Plasmonic Photochemical Nanolithography of Silicon with Active Structural Modulation
Femtosecond laser ablation-driven periodic surface structuring offers a promising method for large-scale and high-throughput nanolithography technique. However, the self-organized periodic structures typically manifest constraints in terms of tunable period and depth, as well as suboptimal regularit...
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| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
American Association for the Advancement of Science (AAAS)
2025-01-01
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| Series: | Ultrafast Science |
| Online Access: | https://spj.science.org/doi/10.34133/ultrafastscience.0084 |
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