Microstrip metal detectors
Elements of the technology are presented for the production of Microсtrip Metal Detectors (MSMD) designed for the charged particles beam as well as synchrotron radiation monitoring. Problems emerged for the photolithography as well as chemical etching applied to the supporting silicon wafer. Takin...
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| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Institute for Nuclear Research, National Academy of Sciences of Ukraine
2006-06-01
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| Series: | Ядерна фізика та енергетика |
| Online Access: | http://jnpae.kinr.kiev.ua/17(1)/Articles_PDF/jnpae-2006-1(17)-0095-Pugatch.pdf |
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