Wafer-Level Characterization and Monitoring Platform for Single-Photon Avalanche Diodes

Wafer-Level Characterization and Monitoring Platform for Single-Photon Avalanche Diodes

When developing a technology based on single-photon avalanche diodes (SPADs), the SPAD characterization is mandatory to debug, optimize and monitor the microfabrication process. This is especially true for the development of SPAD arrays 3D integrated with CMOS readout electronics, where SPAD testing...

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Bibliographic Details
Main Authors: Samuel Parent, Frederic Vachon, Valerie Gauthier, Steve Lamoureux, Alexandre Paquette, Jacob Deschamps, Tommy Rossignol, Nicolas Roy, Philippe Arsenault, Henri Dautet, Serge A. Charlebois, Jean-Francois Pratte
Format: Article
Language:English
Published: IEEE 2024-01-01
Series:IEEE Journal of the Electron Devices Society
Subjects:
Active probe card
photon-to-digital converter
process control monitoring
silicon photomultiplier
single-photon avalanche diode
wafer-level testing
Online Access:https://ieeexplore.ieee.org/document/10414786/
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https://ieeexplore.ieee.org/document/10414786/

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