OPTIMIZATION OF THE ELECTRO-ACOUSTIC SPUTTERING PROCESS BY THE MICROHARDNESS CRITERION
Influence of acoustic parameters (amplitude of ultrasonic oscillations A (mcm), frequency of ultrasonic oscillations (Khz), and a corner between the axis of the wave guide and the vector direction of longitudinal-twisting oscillations (degrees)) process of an electroacoustic dusting of the protectiv...
Saved in:
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Language: | Russian |
| Published: |
Don State Technical University
2010-06-01
|
| Series: | Advanced Engineering Research |
| Subjects: | |
| Online Access: | https://www.vestnik-donstu.ru/jour/article/view/985 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|