Design a novel rectangular MPCVD reactor operated at 2.45 GHz for diamond growth: A simulation-based study
The electric field distribution within a microwave plasma chemical vapor deposition (MPCVD) reactor determines the quality of synthetic diamonds. In this study, we aimed to facilitate diamond deposition for various demands by designing a rectangular MPCVD reactor that can balance and regulate the el...
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| Main Authors: | , , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2025-06-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/5.0272947 |
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