A Review of Optical Interferometry for High-Precision Length Measurement

A Review of Optical Interferometry for High-Precision Length Measurement

Optical interferometry has emerged as a cornerstone technology for high-precision length measurement, offering unparalleled accuracy in various scientific and industrial applications. This review provides a comprehensive overview of the latest advancements in optical interferometry, with a focus on...

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Bibliographic Details
Main Authors:	Guangyao Huang, Can Cui, Xiaoyang Lei, Qixue Li, Shuhua Yan, Xinghui Li, Guochao Wang
Format:	Article
Language:	English
Published:	MDPI AG 2024-12-01
Series:	Micromachines
Subjects:	laser interferometry grating interferometry optical frequency comb length measurement
Online Access:	https://www.mdpi.com/2072-666X/16/1/6
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