Formation and structural studies of integrated membranes based on channel silicon

Formation and structural studies of integrated membranes based on channel silicon

A method for obtaining structures for integrated membranes based on channel silicon is proposed. In this work features of the formation of through channels in electronic silicon are considered depending on the composition of the electrolyte, the concentration of charge carriers and anode etching...

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Bibliographic Details
Main Authors: V. V. Bolotov, K. E. Ivlev, E. V. Knyazev, I. V. Ponomareva
Format: Article
Language:English
Published: Omsk State Technical University, Federal State Autonoumos Educational Institution of Higher Education 2018-07-01
Series:Омский научный вестник
Subjects:
porous silicon
scanning electron microscopy
membranes
Online Access:https://www.omgtu.ru/general_information/media_omgtu/journal_of_omsk_research_journal/files/arhiv/2018/3%20(159)/59-63%20%D0%91%D0%BE%D0%BB%D0%BE%D1%82%D0%BE%D0%B2%20%D0%92.%20%D0%92.,%20%D0%98%D0%B2%D0%BB%D0%B5%D0%B2%20%D0%9A.%20%D0%95.,%20%D0%9A%D0%BD%D1%8F%D0%B7%D0%B5%D0%B2%20%D0%95.%20%D0%92.,%20%D0%9F%D0%BE%D0%BD%D0%BE%D0%BC%D0%B0%D1%80%D0%B5%D0%B2%D0%B0%20%D0%98.%20%D0%92..pdf
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