Formation and structural studies of integrated membranes based on channel silicon
A method for obtaining structures for integrated membranes based on channel silicon is proposed. In this work features of the formation of through channels in electronic silicon are considered depending on the composition of the electrolyte, the concentration of charge carriers and anode etching...
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Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
Omsk State Technical University, Federal State Autonoumos Educational Institution of Higher Education
2018-07-01
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Series: | Омский научный вестник |
Subjects: | |
Online Access: | https://www.omgtu.ru/general_information/media_omgtu/journal_of_omsk_research_journal/files/arhiv/2018/3%20(159)/59-63%20%D0%91%D0%BE%D0%BB%D0%BE%D1%82%D0%BE%D0%B2%20%D0%92.%20%D0%92.,%20%D0%98%D0%B2%D0%BB%D0%B5%D0%B2%20%D0%9A.%20%D0%95.,%20%D0%9A%D0%BD%D1%8F%D0%B7%D0%B5%D0%B2%20%D0%95.%20%D0%92.,%20%D0%9F%D0%BE%D0%BD%D0%BE%D0%BC%D0%B0%D1%80%D0%B5%D0%B2%D0%B0%20%D0%98.%20%D0%92..pdf |
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