Fabrication of 1000-Line/mm orthogonal grating for Micro-Deformation field mapping
High-frequency gratings are vital for microscale deformation field analysis but face fabrication challenges due to cost and complexity. In this study, we innovatively report a rapid fabrication technique of large-area 1000-line/mm (1 µm pitch) orthogonal grating using maskless lithography with a 405...
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| Language: | English |
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Elsevier
2025-05-01
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| Series: | Materials & Design |
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| Online Access: | http://www.sciencedirect.com/science/article/pii/S0264127525003430 |
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| author | Xinyun Xie Qinghua Wang Xiaojun Yan |
| author_facet | Xinyun Xie Qinghua Wang Xiaojun Yan |
| author_sort | Xinyun Xie |
| collection | DOAJ |
| description | High-frequency gratings are vital for microscale deformation field analysis but face fabrication challenges due to cost and complexity. In this study, we innovatively report a rapid fabrication technique of large-area 1000-line/mm (1 µm pitch) orthogonal grating using maskless lithography with a 405 nm UV light source, and apply it to characterize the microscale slip plastic deformation fields of a Nickel-Based Single Crystal superalloy (NBSC) specimen for the first time. Detailed fabrication parameters and quality assessments were outlined. Moreover, in-situ tensile experiments on NBSC specimen in the [001] tensile direction were performed, and the evolution of the microscale plastic deformation fields was obtained by the sampling moiré method. The results showed that the proposed technique enables the stable fabrication of 1000-line/mm grating with 300 nm feature linewidth, rates up to 20–30 min per 1 mm2. The 1000-line/mm grating enables nano-sensitive deformation resolution for plastic deformation displacement fields on the surface of the NBSC specimen. The proposed method provides a feasible deformation carrier fabrication technique to support microscale deformation measurement of various materials. |
| format | Article |
| id | doaj-art-07ab3d8c3e1f47e8a052d9d86c458a75 |
| institution | OA Journals |
| issn | 0264-1275 |
| language | English |
| publishDate | 2025-05-01 |
| publisher | Elsevier |
| record_format | Article |
| series | Materials & Design |
| spelling | doaj-art-07ab3d8c3e1f47e8a052d9d86c458a752025-08-20T02:00:54ZengElsevierMaterials & Design0264-12752025-05-0125311392310.1016/j.matdes.2025.113923Fabrication of 1000-Line/mm orthogonal grating for Micro-Deformation field mappingXinyun Xie0Qinghua Wang1Xiaojun Yan2School of Energy and Power Engineering, Beihang University, Beijing 100191, ChinaCorrespondence author.; School of Energy and Power Engineering, Beihang University, Beijing 100191, ChinaSchool of Energy and Power Engineering, Beihang University, Beijing 100191, ChinaHigh-frequency gratings are vital for microscale deformation field analysis but face fabrication challenges due to cost and complexity. In this study, we innovatively report a rapid fabrication technique of large-area 1000-line/mm (1 µm pitch) orthogonal grating using maskless lithography with a 405 nm UV light source, and apply it to characterize the microscale slip plastic deformation fields of a Nickel-Based Single Crystal superalloy (NBSC) specimen for the first time. Detailed fabrication parameters and quality assessments were outlined. Moreover, in-situ tensile experiments on NBSC specimen in the [001] tensile direction were performed, and the evolution of the microscale plastic deformation fields was obtained by the sampling moiré method. The results showed that the proposed technique enables the stable fabrication of 1000-line/mm grating with 300 nm feature linewidth, rates up to 20–30 min per 1 mm2. The 1000-line/mm grating enables nano-sensitive deformation resolution for plastic deformation displacement fields on the surface of the NBSC specimen. The proposed method provides a feasible deformation carrier fabrication technique to support microscale deformation measurement of various materials.http://www.sciencedirect.com/science/article/pii/S0264127525003430Microscale deformation field measurementsHigh-frequency grating fabricationMaskless lithographySampling moiré methodNickel-based single crystal superalloy |
| spellingShingle | Xinyun Xie Qinghua Wang Xiaojun Yan Fabrication of 1000-Line/mm orthogonal grating for Micro-Deformation field mapping Materials & Design Microscale deformation field measurements High-frequency grating fabrication Maskless lithography Sampling moiré method Nickel-based single crystal superalloy |
| title | Fabrication of 1000-Line/mm orthogonal grating for Micro-Deformation field mapping |
| title_full | Fabrication of 1000-Line/mm orthogonal grating for Micro-Deformation field mapping |
| title_fullStr | Fabrication of 1000-Line/mm orthogonal grating for Micro-Deformation field mapping |
| title_full_unstemmed | Fabrication of 1000-Line/mm orthogonal grating for Micro-Deformation field mapping |
| title_short | Fabrication of 1000-Line/mm orthogonal grating for Micro-Deformation field mapping |
| title_sort | fabrication of 1000 line mm orthogonal grating for micro deformation field mapping |
| topic | Microscale deformation field measurements High-frequency grating fabrication Maskless lithography Sampling moiré method Nickel-based single crystal superalloy |
| url | http://www.sciencedirect.com/science/article/pii/S0264127525003430 |
| work_keys_str_mv | AT xinyunxie fabricationof1000linemmorthogonalgratingformicrodeformationfieldmapping AT qinghuawang fabricationof1000linemmorthogonalgratingformicrodeformationfieldmapping AT xiaojunyan fabricationof1000linemmorthogonalgratingformicrodeformationfieldmapping |