Fabrication of 1000-Line/mm orthogonal grating for Micro-Deformation field mapping
High-frequency gratings are vital for microscale deformation field analysis but face fabrication challenges due to cost and complexity. In this study, we innovatively report a rapid fabrication technique of large-area 1000-line/mm (1 µm pitch) orthogonal grating using maskless lithography with a 405...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2025-05-01
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| Series: | Materials & Design |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S0264127525003430 |
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